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    National Tsing Hua University Institutional Repository > 工學院  > 工業工程與工程管理學系 > 期刊論文 >  Analyzing repair decisions in the site imbalance problem of semiconductor test machines

    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/36660

    Title: Analyzing repair decisions in the site imbalance problem of semiconductor test machines
    Authors: Chen-Fu Chien;Jei-Zheng Wu
    教師: 簡禎富
    Date: 2003
    Publisher: Institute of Electrical and Electronics Engineers
    Relation: IEEE Transactions on Semiconductor Manufacturing, Volume 16, Issue 4, Nov. 2003, pages 704 - 711
    Keywords: decision support systems
    decision trees
    electronic engineering computing
    integrated circuit testing
    maintenance engineering
    semiconductor process modelling
    Abstract: © 2003 Institute of Electrical and Electronics Engineers - Test machines can test multiple IC devices simultaneously. When testing the same group of devices, unusual deviations in yield rates of specific sites from the other sites (i.e., site imbalance) imply a fault in the corresponding sites and the machine. This study develops a decision analysis framework for maximizing profit and customer satisfaction under uncertain conditions. The proposed framework can provide the on-site operators specific decision rules to help decide whether they should continue the test, close specific sites, or shut the machine down to repair it. A numerical example is used for illustration.
    URI: http://www.ieee.org/
    Appears in Collections:[工業工程與工程管理學系] 期刊論文

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