National Tsing Hua University Institutional Repository:Analyzing repair decisions in the site imbalance problem of semiconductor test machines
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    National Tsing Hua University Institutional Repository > 工學院  > 工業工程與工程管理學系 > 期刊論文 >  Analyzing repair decisions in the site imbalance problem of semiconductor test machines


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    题名: Analyzing repair decisions in the site imbalance problem of semiconductor test machines
    作者: Chen-Fu Chien;Jei-Zheng Wu
    教師: 簡禎富
    日期: 2003
    出版者: Institute of Electrical and Electronics Engineers
    關聯: IEEE Transactions on Semiconductor Manufacturing, Volume 16, Issue 4, Nov. 2003, pages 704 - 711
    关键词: decision support systems
    decision trees
    electronic engineering computing
    integrated circuit testing
    maintenance engineering
    semiconductor process modelling
    摘要: © 2003 Institute of Electrical and Electronics Engineers - Test machines can test multiple IC devices simultaneously. When testing the same group of devices, unusual deviations in yield rates of specific sites from the other sites (i.e., site imbalance) imply a fault in the corresponding sites and the machine. This study develops a decision analysis framework for maximizing profit and customer satisfaction under uncertain conditions. The proposed framework can provide the on-site operators specific decision rules to help decide whether they should continue the test, close specific sites, or shut the machine down to repair it. A numerical example is used for illustration.
    URI: http://www.ieee.org/
    http://nthur.lib.nthu.edu.tw/handle/987654321/36660
    显示于类别:[工業工程與工程管理學系] 期刊論文

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