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    National Tsing Hua University Institutional Repository > 原子科學院  > 生醫工程與環境科學系 > 專利  >  Interferometer system for displacement and straightness measurements


    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/36780


    Title: Interferometer system for displacement and straightness measurements
    Authors: Wu, Chien-Ming
    教師: 吳見明
    Date: 2003
    Publisher: Industrial Technology Research Institute
    Relation: US6519042
    Keywords: Interferometer system
    heterodyne frequency
    reference beams
    optical path difference
    spatial-separated beams
    periodic nonlinearity
    perfect symmetry
    avoiding mixing
    Abstract: A laser interferometer system based on three design principles, the heterodyne frequency, the avoiding mixing, and the perfect symmetry, is described. These design principles give rise to the interferometer a high stable system with no periodic nonlinearity. This system is capable of providing both displacement and straightness measurements. The arrangement of invention employs a single frequency stabilized input beam from a laser source which is provided to a frequency-shifted means for converting the input beam into a pair of spatial-separated beams having the same optical properties but different optical frequencies. Two identical energy splitters further split the spatial-separated beams into a pair of measurement beams and a pair of reference beams respectively. The measurement beams are incident onto the measurement target and reference target respectively. The returning beams from both measurement and reference targets are redirected by a measurement branch and then make interference with the reference beams, respectively, at a reference branch. The interfered beams then are provided to a set of photo-receivers to produce an interferometric measurement signal and an interferometric reference signal. These electrical signals are processed in a phase meter to produce an output signal which is proportional to the optical path difference (OPD) between the measurement target and the reference target. To measure the straightness errors of a moving carriage, both measurement and reference targets are replaced by a straightness prism and a straightness reflector, respectively.
    URI: http://patft.uspto.gov/
    http://v3.espacenet.com/textdoc?DB=EPODOC&IDX=US6519042&F=0
    http://nthur.lib.nthu.edu.tw/handle/987654321/36780
    Appears in Collections:[生醫工程與環境科學系] 專利

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