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    National Tsing Hua University Institutional Repository > 工學院  > 工業工程與工程管理學系 > 會議論文  >  Developing statistical models in an early warning system and its empirical study

    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/46429

    Title: Developing statistical models in an early warning system and its empirical study
    Authors: Pei-Nong Chen;Chen-Fu Chien;Sheng-Jen Wang;Chien-Chung Chen;Haw-Jyue Luo
    教師: 簡禎富
    Date: 2004
    Publisher: Institute of Electrical and Electronics Engineers
    Relation: 2004 Semiconductor Manufacturing Technology Workshop Proceedings, Hsinchu, Taiwan, 10-10 Sept. 2004, pages 174 - 177
    Keywords: DRAM chips
    alarm systems
    integrated circuit manufacture
    preventive maintenance
    process monitoring
    production equipment
    statistical analysis
    Abstract: When a new equipment or process is released, it is critical to ensure it behave as expected and stay in normal condition. The study proposes a research framework in which a statistical model is constructed for newly released equipment and process monitoring. An empirical study is conducted in a DRAM fabrication facility for validation. Based on the model, a best set of sample test items which discriminates the newly released equipment is selected and a group of normal equipments is obtained. Thus, the alarm signals can be triggered in an early warning system.
    URI: http://www.ieee.org/
    Appears in Collections:[工業工程與工程管理學系] 會議論文

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