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    National Tsing Hua University Institutional Repository > 工學院  > 工業工程與工程管理學系 > 會議論文  >  A cost-based heuristic for statistically determining sampling frequency in a wafer fab

    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/46432

    Title: A cost-based heuristic for statistically determining sampling frequency in a wafer fab
    Authors: Chen-Fu Chien;Shao-Chung Hsu;Peng, S.;Chia-Hung Wu
    教師: 簡禎富
    Date: 2000
    Publisher: Institute of Electrical and Electronics Engineers
    Relation: 2000 Semiconductor Manufacturing Technology Workshop, Hsinchu, Taiwan, 14-15 June 2000, pages 217 - 229
    Keywords: Bayes methods
    integrated circuit economics
    integrated circuit testing
    integrated circuit yield
    process monitoring
    production testing
    quality control
    sampling methods
    Abstract: In wafer fabrication, because of the long cycle time, the high yield uncertainty and the high manufacturing cost, earlier process monitoring and control are critical. Thus, a number of inspection and measurement stations are set in the fabrication process to assure that the wafer quality meets the specific requirements. Researchers have applied the acceptance sampling plan to determine whether a lot is accepted or not. Due to the limited capacities and costs for in-line wafer inspections, only certain wafers are inspected among a specific number of lots. Thus, it is important to determine the sampling strategy that minimizes the total expected costs, including the inspection costs, false-alarm costs, out-of-control costs, in-control costs, and the costs from the false-passed wafers. In this study, we developed a cost-based heuristic for statistically determining the sampling frequency in wafer fab based on the economics, control chart design, Bayesian decision analysis, and the acceptance sampling strategy. We aimed to determine the optimal sampling frequency that trades off the various risks (i.e. the aggregation of cost and probability)
    URI: http://www.ieee.org/
    Appears in Collections:[工業工程與工程管理學系] 會議論文

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