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    National Tsing Hua University Institutional Repository > 原子科學院  > 工程與系統科學系 > 會議論文  >  Batch assembly micro-ball lens array for Si-based optical coupling platform in free space


    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/47002


    Title: Batch assembly micro-ball lens array for Si-based optical coupling platform in free space
    Authors: Shen,S. -C;Pan,C. -T;Chou,H. -P;Chao,Y. -H;Lin,K. -L;Yang Jauh Jung
    教師: 周懷樸
    Date: 2001
    Publisher: The International Society for Optical Engineering
    Relation: Proc. SPIE, Vol. 4416, 2001, Pages 326
    Keywords: Optical fiber coupling
    Microlenses
    Silicon wafers
    Photoresists
    Optical communication
    Polymers
    Etching
    Anisotropy
    Abstract: The paper presents novel concepts of batch fabrication of micro-ball lens array technology integrated on the silicon-based wafer by low temperature wafer bonding by which can improve appropriate distance of optical fiber coupling. The silicon based coupling platform consists of the self-parking framework, micro-ball lens array, and precision platform for optical fiber coupling purpose. The structure of optical platform is able to improve distance of between fiber and micro-ball lens and increase coupling efficiency. The micro-ball lens array is batch fabricated by polymeric material and melting photoresist through low temperature wafer bonding. Then batch assembly onto each other flat-topped mesa that adjoins to the v-groove. The comer compensation offers a method to fabricate self-parking framework and flat-topped mesa in the intersection of two v-grooves. This fabrication process not only provides accurate coupling distance between fibers and micro-ball lens hut also reduces micro-assembly cost.
    URI: http://spie.org/
    http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/47002
    Appears in Collections:[工程與系統科學系] 會議論文

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