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    National Tsing Hua University Institutional Repository > 原子科學院  > 工程與系統科學系 > 期刊論文 >  Preparation of textured growth Pb(Zr,Ti)O3 thin films on Si substrate using SrTiO3 as buffer layers


    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/48328


    Title: Preparation of textured growth Pb(Zr,Ti)O3 thin films on Si substrate using SrTiO3 as buffer layers
    Authors: C.K. Kao;N.P. Kuraganti;C.H. Tsai;I.N. Lin;R.K. Pandey;K.J. Ma
    教師: 蔡春鴻
    Date: 2003
    Publisher: Taylor & Francis
    Relation: Integrated Ferroelectrics, v 57, p 1257-1264, 2003
    Keywords: WAVE-GUIDES
    (PB
    Abstract: PZT thin films are deposited on SiO2/Si substrate by metallo-organic decomposition (MOD) process, using SrTiO3 (STO) as buffer layer for textured growth. The STO layers deposited on SiO2 /Si substrate by pulsed laser deposition process show (100)/(200) preferred orientation, whereas the STO buffer layer deposited on silica substrate using spin-coating technique show random orientation behavior. The use of STO as buffer layers enhanced the crystallization and the preferred orientations of the PZT films. The PZT on STO buffered SiO2 /Si substrates thus obtained possess high refractive index, (n) PZT/STO = 2.1159, and are of good enough quality for optical waveguide applications.
    URI: http://www.tandf.co.uk/journals/default.asp
    http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/48328
    Appears in Collections:[工程與系統科學系] 期刊論文

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