English  |  正體中文  |  简体中文  |  Items with full text/Total items : 54367/62174 (87%)
Visitors : 13676962      Online Users : 18
RC Version 6.0 © Powered By DSPACE, MIT. Enhanced by NTHU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version
    National Tsing Hua University Institutional Repository > 生命科學院  > 生命科學系 > 會議論文  >  A 3D GLASS MICROPROBE ARRAY WITH EMBEDDED SILICON FOR ALIGNMENT AND ELECTRICAL CONNECTION


    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/49593


    Title: A 3D GLASS MICROPROBE ARRAY WITH EMBEDDED SILICON FOR ALIGNMENT AND ELECTRICAL CONNECTION
    Authors: Lee, YD.;Lin CW.;Yeh SR.;Chang YC.;Fu CC.;Fang WL.
    教師: 張兗君
    Date: 2009
    Publisher: Institute of Electrical and Electronics Engineers
    Relation: Solid-State Sensors,Actuators and Microsystems Conference,2009. TRANSDUCERS 2009. International,Denver,CO,21-25 June 2009,Pages 2262 - 2265
    Keywords: MICROPROBE
    ALIGNMENT
    Abstract: This study presents a simple process to assemble the 3D glass microprobe array. Glass microprobe with embedded silicon (ES) was fabricated by glass reflow process. In the 1st assembly, the chips with 2D glass microprobe array were bonded by parylene-C to form the 3D the microprobe array. In the 2nd assembly, the 3D probe array was then mounted on the silicon carrier. The ES is employed for alignment during the assembly, and also acts as the electrical routing for signal recording. In application, the impedance of this glass microprobe was measured. The impedance at 1 kHz was 1.1 MOmega. Action potential from crayfish nerve cord was also successfully recorded.
    URI: http://www.ieee.org/
    http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/49593
    Appears in Collections:[生命科學系] 會議論文

    Files in This Item:

    File Description SizeFormat
    index.html0KbHTML1569View/Open


    在NTHUR中所有的資料項目都受到原著作權保護,僅提供學術研究及教育使用,敬請尊重著作權人之權益。若須利用於商業或營利,請先取得著作權人授權。
    若發現本網站收錄之內容有侵害著作權人權益之情事,請權利人通知本網站管理者(smluo@lib.nthu.edu.tw),管理者將立即採取移除該內容等補救措施。

    SFX Query

    與系統管理員聯絡

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback