English  |  正體中文  |  简体中文  |  Items with full text/Total items : 54367/62174 (87%)
Visitors : 13854383      Online Users : 112
RC Version 6.0 © Powered By DSPACE, MIT. Enhanced by NTHU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version
    National Tsing Hua University Institutional Repository > 電機資訊學院 > 電機工程學系 > 期刊論文 >  An Investigation of Scanning Capacitance Microscopy on Iron-Contaminated p-Type Silicon


    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/12527


    Title: An Investigation of Scanning Capacitance Microscopy on Iron-Contaminated p-Type Silicon
    Authors: Chang,M. N.
    Chang,T. Y.
    Pan,F. M.
    Wu,B. W.
    Lei,T. F.
    教師: 張慶元
    Date: 2001
    Publisher: Electrochemical Society
    Relation: ELECTROCHEMICAL AND SOLID STATE LETTERS Volume: 4 Issue: 9 Pages: G69-G71 Published: SEP 2001
    Keywords: Semiconducting silicon
    Iron
    Electric conductivity of solids
    Atomic force microscopy
    Transmission electron microscopy
    Morphology
    Abstract: Scanning capacitance microscopy (SCM) is employed to examine iron-contaminated p-type Si samples. For slightly contaminated samples, a dc voltage of -0.8 V, applied between the sample and the conductive tip, induces positive trapped charges. Owing to the existence of these charges, the region containing trapped charges exhibits an obviously low dC/dV signal. According to contact-mode atomic force microscopy results, the surface morphology has little effect on the SCM signal. The experimental results indicate that SCM is capable of detecting the distribution of oxidation-related defects which cannot otherwise be easily observed by atomic force microscopy and transmission electron microscopy.
    Relation Link: http://www.electrochem.org/
    URI: http://nthur.lib.nthu.edu.tw/handle/987654321/12527
    Appears in Collections:[電機工程學系] 期刊論文
    [積體電路設計技術研發中心] 期刊論文

    Files in This Item:

    File Description SizeFormat
    2030110010005.txt0KbText397View/Open


    在NTHUR中所有的資料項目都受到原著作權保護,僅提供學術研究及教育使用,敬請尊重著作權人之權益。若須利用於商業或營利,請先取得著作權人授權。
    若發現本網站收錄之內容有侵害著作權人權益之情事,請權利人通知本網站管理者(smluo@lib.nthu.edu.tw),管理者將立即採取移除該內容等補救措施。

    SFX Query

    與系統管理員聯絡

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback