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    NTHUR > College of Electrical Engineering and Computer Science > Undergraduate Program of EECS > UPEECS Journal / Magazine Articles >  Alignment tolerance enlargement of a high-speed photodiode by a self-positioned microball lens

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    Title: Alignment tolerance enlargement of a high-speed photodiode by a self-positioned microball lens
    Authors: Huang,Yun-Hsun;Yang,Chih-Chao;Peng,Te-Chin;Wu,Meng-Chyi;Ho,Chong-Long;Ho,Wen-Jeng
    Teacher: 吳孟奇
    Date: 2006
    Publisher: Institute of Electrical and Electronics Engineers
    Relation: IEEE PHOTONICS TECHNOLOGY LETTERS,Volume 18,Issue 1-4,Pages 112-114 ,JAN-FEB 2006
    Keywords: 10 Gb/s
    microball lens
    p-i-n photodiode
    Abstract: © 2006 Institute of Electrical and Electronics Engineers - By integrating a commercially available microball lens on the InGaAs p-i-n photodiode chip, we have achieved at least 5- and 16-fold improvements of the optical alignment tolerance in the transverse and longitudinal axes, respectively, without sacrificing the diode efficiency. The optical alignment during lens/chip integration is achieved by a self-positioning process, which provides an on-chip ball-lens socket in concentric circles to the photodiode aperture to sustain the drop-in microball lens. The photodiode after lens integration exhibits a 3-dB bandwidth larger than 9 GHz and a responsivity larger than 0.9 A/W, both at 1310-nm wavelength. In addition, the InGaAs photodiode exhibits a dark current density of less than 3 μA/cm2, both before and after lens positioning, indicating a proper integration. © 2005 IEEE.
    Appears in Collections:[Undergraduate Program of EECS] UPEECS Journal / Magazine Articles

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