National Tsing Hua University Institutional Repository:Alignment tolerance enlargement of a high-speed photodiode by a self-positioned microball lens
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    National Tsing Hua University Institutional Repository > 電機資訊學院 > 電機資訊學院學士班 > 期刊論文 >  Alignment tolerance enlargement of a high-speed photodiode by a self-positioned microball lens


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    题名: Alignment tolerance enlargement of a high-speed photodiode by a self-positioned microball lens
    作者: Huang,Yun-Hsun;Yang,Chih-Chao;Peng,Te-Chin;Wu,Meng-Chyi;Ho,Chong-Long;Ho,Wen-Jeng
    教師: 吳孟奇
    日期: 2006
    出版者: Institute of Electrical and Electronics Engineers
    關聯: IEEE PHOTONICS TECHNOLOGY LETTERS,Volume 18,Issue 1-4,Pages 112-114 ,JAN-FEB 2006
    关键词: 10 Gb/s
    InGaAs
    microball lens
    p-i-n photodiode
    socket
    摘要: © 2006 Institute of Electrical and Electronics Engineers - By integrating a commercially available microball lens on the InGaAs p-i-n photodiode chip, we have achieved at least 5- and 16-fold improvements of the optical alignment tolerance in the transverse and longitudinal axes, respectively, without sacrificing the diode efficiency. The optical alignment during lens/chip integration is achieved by a self-positioning process, which provides an on-chip ball-lens socket in concentric circles to the photodiode aperture to sustain the drop-in microball lens. The photodiode after lens integration exhibits a 3-dB bandwidth larger than 9 GHz and a responsivity larger than 0.9 A/W, both at 1310-nm wavelength. In addition, the InGaAs photodiode exhibits a dark current density of less than 3 μA/cm2, both before and after lens positioning, indicating a proper integration. © 2005 IEEE.
    URI: http://www.ieee.org/
    http://nthur.lib.nthu.edu.tw/handle/987654321/41933
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