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    National Tsing Hua University Institutional Repository > 工學院  > 工業工程與工程管理學系 > 會議論文  >  Machine grouping algorithm for stepper back-up and an empirical study


    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/46426


    Title: Machine grouping algorithm for stepper back-up and an empirical study
    Authors: Chia-Yu Hsu;Chen-Fu Chien;Yung-Chen Tsao;Cheng-Yi Li
    教師: 簡禎富
    Date: 2004
    Publisher: Institute of Electrical and Electronics Engineers
    Relation: 2004 Semiconductor Manufacturing Technology Workshop Proceedings, Hsinchu, Taiwan, 9-10 Sept. 2004, Pages 170-173
    Keywords: flexible manufacturing systems
    integrated circuit yield
    photolithography
    semiconductor device manufacture
    Abstract: Considering the limitations of the operation cost and the flexibility need of the manufacturing, the wafer was unable to expose in the same stepper from layer to layer in the real setting. In addition, the lithographic systems also require appreciate back-ups to avoid the yield loss as the equipment fault or shut-down for maintenance. This study aims to develop a machine group algorithm for the stepper and thus propose appropriate back-up based on the similarity of systematic overlay errors and residuals. The results are confirmed with judgments of domain experts and thus validated this approach
    URI: http://www.ieee.org/
    http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/46426
    Appears in Collections:[工業工程與工程管理學系] 會議論文

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