National Tsing Hua University Institutional Repository:A Large Area ECR Plasma Source
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    题名: A Large Area ECR Plasma Source
    作者: T.L. Lin;Y. Hu;K.C. Leou;J.H. Shiau;Y.C. Lan
    教師: 柳克強
    日期: 1997
    出版者: Institute of Electrical and Electronics Engineers
    關聯: IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science, 19-22 May 1997 , San Diego, CA, USA
    关键词: ECR plasma source
    plasma source
    permanent magnet electron cyclotron resonance source
    摘要: Summary form only given, as follows. A large area, permanent magnet ECR plasma source employing a buffer cavity and a TE01 mode converter has been designed and is being constructed at NTHU. The magnet structure consists of two sets of rings with radially directed magnets along with iron pole-pieces and a shielding envelope. Calculation using the PANDIRA code has been employed to yield the desired magnetic field profile. The 2.45 GHz microwave power is coupled from a rectangular waveguide to the TE10 circular waveguide mode through a Flower-Pedal mode converter. The design of the converter has been modeled by a finite element electromagnetic simulation code HFSS, yielding a conversion efficiency of 96%. A buffer cavity developed in our previous work is also employed to increase operation stability by reducing the variation of load impedance seen by the microwave generator. The ECR heating of plasma and wave propagation have been investigated by the PIC-MCC simulation code developed previously. Both the design and simulation results are presented.
    URI: http://www.ieee.org/
    http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/47075
    显示于类别:[工程與系統科學系] 會議論文

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