National Tsing Hua University Institutional Repository:EFAb:rapid,low-cost desktop micromachining of high aspect ratio true 3-D mems
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    National Tsing Hua University Institutional Repository > 原子科學院  > 工程與系統科學系 > 會議論文  >  EFAb:rapid,low-cost desktop micromachining of high aspect ratio true 3-D mems


    题名: EFAb:rapid,low-cost desktop micromachining of high aspect ratio true 3-D mems
    作者: Gang Zhang;Fan-Gang Tseng;Uri Frodis;Florian Mansfeld;Peter Will
    教師: 曾繁根
    日期: 1999
    出版者: Institute of Electrical and Electronics Engineers
    關聯: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 1999, p 244-251
    关键词: EFAB
    Instant Masking
    摘要: EFAB (Electrochemical FABrication) is a new micromachining technology targeted at the rapid, automated batch fabrication of an unlimited variety of high-aspect-ratio metallic microstructures. By applying the principles of Solid Freeform Fabrication to the manufacturing of microstructures, EFAB provides nearly arbitrary, truly 3-D geometry. EFAB exploits `Instant Masking' - a new high-speed in-situ selective plating technique - to quickly, repeatably, and precisely deposit an unlimited number of layers of material. EFAB makes possible economical prototype and short run production of microstructures using inexpensive desktop equipment, yet is scalable to mass production. By generating layers using electrodeposition at low temperature, EFAB makes feasible the manufacture of extremely complex microstructures that are deposited over and electrically integrated with standard foundry-processed ICs.
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