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    National Tsing Hua University Institutional Repository > 原子科學院  > 工程與系統科學系 > 期刊論文 >  Energy-tunable transmission x-ray microscope for differential contrast imaging with near 60 nm resolution tomography


    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/47911


    Title: Energy-tunable transmission x-ray microscope for differential contrast imaging with near 60 nm resolution tomography
    Authors: Yin GC;Tang MT;Song YF;Chen FR;Liang KS;Duewer FW;Yun WB;Ko CH;Shieh HPD
    教師: 陳福榮
    Date: 2006
    Publisher: American Institute of Physics
    Relation: APPLIED PHYSICS LETTERS, American Institute of Physics, Volume 88, Issue 24, JUN 12 2006
    Keywords: ZONE PLATES
    SPATIAL-RESOLUTION
    REFRACTIVE LENSES
    Abstract: An energy-tunable transmission hard x-ray microscope with close to 60 nm spatial resolution in three dimensions (3D) has been developed. With a cone beam illumination, a zone plate of 50 nm outmost zone width, a stable mechanical design, and software feedback, we obtained tomographic data sets that are close to 60 nm spatial resolution. Meanwhile, the element specific imaging was also obtained by a differential absorption contrast technique used below and above the absorption of the element. Examples of advanced intergraded circuit devices are used to demonstrate the element selectivity and spatial resolution in 3D of the microscope.
    URI: http://www.aip.org/
    http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/47911
    Appears in Collections:[工程與系統科學系] 期刊論文

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