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    NTHUR > College of Engineering  > Department of Power Mechanical Engineering > PME Journal / Magazine Articles >  Out-of-plane Polymer Hollow Micro-needle Array Integrated On a Microfluidic Chip

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    Title: Out-of-plane Polymer Hollow Micro-needle Array Integrated On a Microfluidic Chip
    Authors: Heng-Chi Huang;Chien-Chung Fu
    Teacher: 傅建中
    Date: 2005
    Publisher: Institute of Electrical and Electronics Engineers
    Relation: 2005 IEEE SENSORS, VOLS 1 AND 2, Institute of Electrical and Electronics Engineers, 2005, Pages 484-487
    Keywords: lithography
    Abstract: This paper presented a novel method for the fabrication of out-of-plane hollow polymer micro-needle arrays. This method of the fabrication combined two different back-side exposure procedures was able to produce hollow micro needles with a nearly vertical internal wall and a tapered outside wall by one lithography step. Micro-fluidic channels can be integrated with the needle array by this approach simultaneously. The arrays are able to fabricate on a flexible membrane such as PDMS for compliant applications. Different types of the needles had been successfully realized and demonstrated in this paper
    Appears in Collections:[Department of Power Mechanical Engineering] PME Journal / Magazine Articles

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