National Tsing Hua University Institutional Repository:Out-of-plane Polymer Hollow Micro-needle Array Integrated On a Microfluidic Chip
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    National Tsing Hua University Institutional Repository > 工學院  > 動力機械工程學系 > 期刊論文 >  Out-of-plane Polymer Hollow Micro-needle Array Integrated On a Microfluidic Chip


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    题名: Out-of-plane Polymer Hollow Micro-needle Array Integrated On a Microfluidic Chip
    作者: Heng-Chi Huang;Chien-Chung Fu
    教師: 傅建中
    日期: 2005
    出版者: Institute of Electrical and Electronics Engineers
    關聯: 2005 IEEE SENSORS, VOLS 1 AND 2, Institute of Electrical and Electronics Engineers, 2005, Pages 484-487
    关键词: lithography
    microfluidics
    polymers
    摘要: This paper presented a novel method for the fabrication of out-of-plane hollow polymer micro-needle arrays. This method of the fabrication combined two different back-side exposure procedures was able to produce hollow micro needles with a nearly vertical internal wall and a tapered outside wall by one lithography step. Micro-fluidic channels can be integrated with the needle array by this approach simultaneously. The arrays are able to fabricate on a flexible membrane such as PDMS for compliant applications. Different types of the needles had been successfully realized and demonstrated in this paper
    URI: http://www.ieee.org/
    http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/50260
    显示于类别:[動力機械工程學系] 期刊論文

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