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    National Tsing Hua University Institutional Repository > 工學院  > 動力機械工程學系 > 期刊論文 >  3D high aspect ratio micro structures fabricated by one step UV lithography

    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/50272

    Title: 3D high aspect ratio micro structures fabricated by one step UV lithography
    Authors: Huang, H.;Yang, W.;Wang, T.;Chuang, T.;Fu, C.
    教師: 傅建中
    Date: 2007
    Publisher: Institute of Physics
    Relation: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Institute of Physics, Volume 17, Issue 2, FEB 2007, Pages 291-296
    Keywords: 3D
    UV lithography
    Abstract: We present in this paper an interesting idea to fabricate 3D high aspect ratio micro structures. Pillars with different heights can be generated with one step UV lithography. Various 3D micro structures have been successfully fabricated. A Taiwan 3D terrain map is selected to demonstrate the ability of the proposed method. We will introduce the idea of this approach, fabrication details and plenty of successful experimental results in this paper
    URI: http://www.iop.org/
    Appears in Collections:[動力機械工程學系] 期刊論文

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