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    National Tsing Hua University Institutional Repository > 工學院  > 動力機械工程學系 > 期刊論文 >  A 1xN rotary vertical micro mirror for optical switching applications


    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/50622


    Title: A 1xN rotary vertical micro mirror for optical switching applications
    Authors: Tu, Ching-Chen;Fanchiang, Kuohao;Liu, Cheng-Hsien
    教師: 劉承賢
    Date: 2005
    Publisher: International Society for Optical Engineering
    Relation: Proc. SPIE, International Society for Optical Engineering, Volumes 5719, 2005, Pages 14
    Keywords: Optical switches
    Microelectromechanical devices
    Optical communication
    Micromachining
    Films
    Self assembly
    Doppler effect
    Dense wavelength division multiplexing
    Electric potential
    Computer simulation
    Abstract: We report a 1xN rotary optical switching mirror actuated by an electrostatic comb-driver for the optical networking. A variety of MEMS optical switching mirrors have been recently proposed. Some of these devices utilize surface micromachined films as reflection micromirrors and result in optical degradation. Some of these devices fabricated by bulk micromachining highly rely on delicate assembly for the micromirrors to the top of the actuators. In this paper, we focus on developing a rotary optical switching micromirror with no need of delicate assembly. The rotary actuator and the switching micromirror are both fabricated by deep RIE in our design. We use the Spin-On-Glass (SOG), which is used as the intermediated layer in the low temperature boning, to fabricate a rotary MEMS optical switching mirror with self-assembly. We successfully assemble the micromirror on top of the rotor stage of the rotary actuator. Experimental results show that our rotary vertical micromirror rotates about 1.5° under 150 volts. The first vibration mode of this rotary switching MEMS mirror is a rotary mode and appears around 3.4 kHz, which is measured via a Polytec laser doppler vibrometer.
    URI: http://spie.org/
    http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/50622
    Appears in Collections:[動力機械工程學系] 期刊論文

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