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    National Tsing Hua University Institutional Repository > 理學院 > 物理系 > 期刊論文 >  The outgassing and pumping effect of an ultrahigh vacuum system

    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/54350

    Title: The outgassing and pumping effect of an ultrahigh vacuum system
    Authors: Liu, Y.C.;Wu, S.C.;Chen, J.R.;Tzeng, H.S.
    教師: 吳秀錦
    Date: 1985
    Publisher: 中華民國物理學會
    Relation: Chinese Journal of Physics, 中華民國物理學會, Volume 23, Issue 4, 1985, Pages 273
    Keywords: pumping effect
    ultrahigh vacuum system
    Abstract: An ultimate pressure of 4×10-12 Torr was reached in a locally made SUS304 stainless steel vacuum chamber. An ion pump, titanium sublimation pump and non-evaporable getter pump were used in the system. The pumping and outgassing effects of the pumps were studied. The pumping effect of gauges and a Ti-ball during preheating procedures were observed. Outgassing during bakeout and after turning the pumps off is also studied.
    URI: http://adsabs.harvard.edu/abs/1985ChJPh..23..273L
    Appears in Collections:[物理系] 期刊論文

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