National Tsing Hua University Institutional Repository:AlGaN/GaN HEMTs with low leakage current and high on/off current ratio
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    National Tsing Hua University Institutional Repository > 電機資訊學院 > 電機工程學系 > 期刊論文 >  AlGaN/GaN HEMTs with low leakage current and high on/off current ratio


    题名: AlGaN/GaN HEMTs with low leakage current and high on/off current ratio
    作者: Y. Lin;Y. Lian;S. Hsu
    教師: 徐碩鴻
    日期: 2010
    出版者: Institute of Electrical and Electronics Engineers
    關聯: Electron Device Letters, IEEE, Institute of Electrical and Electronics Engineers, Volume 31, Issue 2, Feb. 2010, Pages 102 - 104
    关键词: Flicker noise
    leakage current
    摘要: In this letter, we propose using an oxide-filled isolation structure followed by N2/H2 postgate annealing to reduce the leakage current in AlGaN/GaN HEMTs. An OFF-state drain leakage current that is smaller than 10−9 A/mm (minimum 5.1 × 10−10 A/mm) can be achieved, and a gate leakage current in the range of 7.8 × 10−10 to 9.2 × 10−11 A/mm (VGS from −10 to 0 V and VDS = 10 V) is obtained. The substantially reduced leakage current results in an excellent ON/OFF current ratio that is up to 1.5 × 108. An improved flicker noise characteristic is also observed in the oxide-filled devices compared with that in the traditional mesa-isolated GaN HEMTs.
    显示于类别:[電機工程學系] 期刊論文


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