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    National Tsing Hua University Institutional Repository > 電機資訊學院 > 電機工程學系 > 期刊論文 >  A Study of Emitter Formation by Various Etching Techniques and Its Application to Flat Panel Display


    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/72177


    Title: A Study of Emitter Formation by Various Etching Techniques and Its Application to Flat Panel Display
    Authors: H.C. Lee;R.S. Huang
    教師: 黃瑞星
    Date: 1995
    Publisher: 中國工程師學會
    Relation: Journal of the Chinese Institute of Engineers, 中國工程師學會, Volume 18, Issue 4, 1995, Pages 531-544
    Keywords: field‐emission
    emitter array
    flat panel display
    Abstract: In view of the potential advantages of using field‐emission cathodes as electron sources, a renewed interest in advanced IC technology utilizing silicon‐based coldcathode microelectronics is emerging. However, some etching results concerning emitter formation are still unknown. This paper presents a study of emitter formation by various wet and dry etching methods. Some geometrical models are given for the analysis of anisotropic etching results. The emission features from different emitter arrays are also given for comparison. Through understanding the emission characteristics of various emitter arrays, a novel design for Field‐Emission Flat Panel Display is proposed.
    Relation Link: http://www.cie.org.tw/
    URI: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/72177
    Appears in Collections:[電機工程學系] 期刊論文

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