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    National Tsing Hua University Institutional Repository > 工學院  > 動力機械工程學系 > 會議論文  >  High-aspect-ratio nanoimprinted structures for a multi-pole magnetic scale

    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/78814

    Title: High-aspect-ratio nanoimprinted structures for a multi-pole magnetic scale
    Authors: Xu, Zhi-Hao;Wu, Chien-Li;Sung, Cheng-Kuo;Wang, Sheng-Ching;Chin, Tsung-Shune
    Description: 清華大學學生國際會議獲獎論文:徐志豪
    HARMNST 2013 Poster Award
    Date: 2013
    Publisher: HARMNST 2013 Organizing Committee
    Relation: High Aspect Ratio Micro and Nano System Technology (HARMNST 2013), Berlin, Apr. 2013
    Keywords: Nanoimprint
    Pole pitch
    Magnetic scale
    Demagnetization factor
    High-aspect-ratio structures
    Abstract: Conventional non-structured magnetic scales can only achieve a pole pitch of around 1 mm by dedicate magnetization process; a smaller magnetic pole pitch yields a higher resolution. This study describes a practical approach to obtain high resolution multi-pole magnetic scales using high-aspect-ratio nanoimprinted structures. The dimensions of structure were designed according to demagnetization curve of a magnet, which indicates that a high-aspect-ratio structure is required. Simulation results show that the high-aspect-ratio grating has a larger magnetic strength, steeper variation, and greater tolerance of detection gap than those of low-aspect-ratio gratings. Magnetic flux density in the z direction increases significantly with a decrease of the detection gap. High magnetic strength and flux density contrast benefit signal detection and processing. Nanoimprint technology has shown its potential to fabricate a multi-pole magnetic scale with a pole-pitch of down to 72 nm. To further implement we need to optimize magnetic materials and magnetic sensors such as those widely used in T-bit hard disks, CoCrPt media and giant magneto-resistance sensors.
    URI: http://www.harmnst2013.org/
    Appears in Collections:[動力機械工程學系] 會議論文

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