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    National Tsing Hua University Institutional Repository > 歷任校長 > 劉兆玄 (1987-1993) > 期刊論文 >  Synthesis and Characterization of Fluorinated β-Ketoiminate and Imino-Alcoholate Pd Complexes: Precursors for Palladium Chemical Vapor Deposition


    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/81121


    Title: Synthesis and Characterization of Fluorinated β-Ketoiminate and Imino-Alcoholate Pd Complexes: Precursors for Palladium Chemical Vapor Deposition
    Authors: Liu, Y.-H.;Cheng, Y.-C.;Tung, Y.-L.;Chi, Y.;Chen, Y.-L.;Liu, C.-S.;Peng, S.-M.;Lee, G.-H.
    教師: 劉兆玄
    Date: 2003
    Publisher: Royal Society of Chemistry
    Relation: JOURNAL OF MATERIALS CHEMISTRY, Royal Society of Chemistry, Volume 13, Issue 1, 2003, Pages 135-142
    Keywords: METAL-ORGANIC PRECURSORS
    THIN-FILMS
    PLATINUM
    TEMPERATURE
    COPPER
    SODIUM
    MOCVD
    ORGANOMETALLICS
    CATALYSTS
    SUPPORTS
    Abstract: The design and synthesis of Pd complexes with two beta-ketoiminate or with two imino-alcoholate chelate ligands is reported. In order to establish their structures in the solid-state, methoxyethyl substituted complexes 1c and 2c were characterized by single crystal X-ray diffraction, showing a square-planar local coordination for the Pd atom, but the beta-ketoiminate ligands of 1c gave a bent basal plane involving two chelating hexagons, which was in sharp contrast to the boat configuration of the imino-alcoholate ligands observed in the second complex 2c. Chemical vapor deposition (CVD) experiments were conducted at deposition temperatures of 250-350 degreesC. Scanning electron micrographs (SEM) were taken to reveal the surface morphologies and grain sizes of the Pd metal thin films. The resulting thin films were found to contain a low level of carbon and oxygen impurities using O-2 as the carrier gas, as measured by X-ray photoelectron spectroscopy (XPS).
    Relation Link: http://www.rsc.org/
    URI: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/81121
    Appears in Collections:[劉兆玄 (1987-1993)] 期刊論文
    [化學系] 期刊論文

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