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    National Tsing Hua University Institutional Repository > 歷任校長 > 劉兆玄 (1987-1993) > 期刊論文 >  Deposition of Conductive Ru and RuO2 Thin Films Employing a Pyrazolate Complex [Ru(CO)3(3,5-(CF3)2-pz)]2 as the CVD Source Reagent


    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/81123


    Title: Deposition of Conductive Ru and RuO2 Thin Films Employing a Pyrazolate Complex [Ru(CO)3(3,5-(CF3)2-pz)]2 as the CVD Source Reagent
    Authors: Song, Y.-H.;Chen, Y.-L.;Chi, Y.;Liu, C.-S.;Ching, W.-L.;Kai, J. J.;Chen, R.-S.;Huang, Y.-S.;Carty, A. J.
    教師: 劉兆玄
    Date: 2003
    Publisher: Wiley-VCH Verlag Berlin
    Relation: CHEMICAL VAPOR DEPOSITION, Wiley-VCH Verlag Berlin, Volume 9, Issue 3, JUN 2003, Pages 162-169
    Keywords: CHEMICAL-VAPOR-DEPOSITION
    BRIDGED RUTHENIUM(I) COMPLEXES
    ELECTRODE STRUCTURES
    LIQUID INJECTION
    RUTILE RUO2
    METAL
    GROWTH
    RAMAN
    (BA,SR)TIO3
    PRECURSORS
    Abstract: The reaction of Ru-3(CO)(12) with three equivalent of 3,5-bis(trifluoromethyl) pyrazole [(3,5-(CF3)(2)-pz)H] at 180degreesC produces the double pyrazolate-bridged ruthenium complex [Ru(CO)(3)(3,5-(CF3)(2)-pz)](2), (1), in high yield. Ibis ruthenium complex has been characterized by spectroscopic methods, revealing a molecular structure similar to that of the diosmium analogue [OS(CO)(3)(3,5-(CF3)(2)-pz)](2). Thermogravimetric analysis (TGA) of complex 1 showed an enhanced volatility compared to the parent carbonyl compound Ru-3(CO)(12) and the closely related, unsaturated 3,5-di-tert-butyl pyrazole complex (2) [Ru-2(CO)5(3,5-t-Bu-2-pz)(2)]. Using complex 1 as the CVD source reagent, ruthenium metal with a preferred (002) orientation can be deposited at 400 degreesC using H-2 as the carrier gas. If, however, O-2 is used as the carrier gas, RuO2 thin films with a (101) orientation are obtained. The as-deposited metal thin films were characterized by various surface techniques, as well as by electrical resistivity measurements.
    Relation Link: http://www.wiley-vch.de/publish/en/
    URI: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/81123
    Appears in Collections:[劉兆玄 (1987-1993)] 期刊論文
    [化學系] 期刊論文

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