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    National Tsing Hua University Institutional Repository > 歷任校長 > 劉兆玄 (1987-1993) > 期刊論文 >  Synthesis and Characterization of Ruthenium Complexes with Two Fluorinated Amino Alkoxide Chelates. The Quest to Design Suitable MOCVD Source Reagents


    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/81125


    Title: Synthesis and Characterization of Ruthenium Complexes with Two Fluorinated Amino Alkoxide Chelates. The Quest to Design Suitable MOCVD Source Reagents
    Authors: Lai, Y.-H.;Chou, T.-Y.;Song, Y.-H.;Liu, C.-S.;Chi, Y.;Carty, A. J.;Peng, S.-M.;Lee, G.-H.
    教師: 劉兆玄
    Date: 2003
    Publisher: American Chemical Society
    Relation: CHEMISTRY OF MATERIALS, American Chemical Society, Volume 15, Issue 12, JUN 17 2003, Pages 2454-2462
    Keywords: RUO2 THIN-FILMS
    CVD SOURCE REAGENTS
    CHEMICAL-VAPOR-DEPOSITION
    CARBONYL-COMPLEXES
    METAL-CARBONYLS
    PRECURSORS
    LIGANDS
    DIOXIDE
    GROWTH
    (BA,SR)TIO3
    Abstract: The synthesis and characterization of ruthenium complexes [Ru(CO)(2)(amak)(2)] and [Ru(COD)(amak)(2)] (where COD = 1,4-cyclooctadiene) are reported, where (amak)H is an abbreviation for a series of fluorinated amino alcohol ligands with formula HOC(CF3)(2)CH2-NHR, where R = H, Me, Et, and (CH2)(2)OMe. The carbonyl complex [Ru(CO)(2)(amak1)(2)] (I with R = H) was examined by X-ray diffraction (XRD), showing an octahedral coordination for the Ru atom, with two cis carbonyl ligands and two amino alkoxide chelates. For the COD complexes [Ru(COD)(amak1)(2)] (3 with R = H) and [Ru(COD)(amak3)(2)] (4 with R = Et), the structural analysis indicated the existence of two distinct spatial arrangements of amino alkoxide chelates with respect to the coordinated COD ligand, depending on the type of amino group selected. All of these complexes show good volatility and thermal stability. For complexes 2 and 4, which are more volatile and low-melting, chemical vapor deposition (CVD) experiments were conducted at temperatures of 325-425 degreesC, using both H-2 and a mixture of 2% O-2 in argon as the carrier gas. Scanning electron micrographs (SEMs) were taken to reveal the surface morphologies; these Ru thin films were found to contain low levels of carbon and oxygen impurities, as measured by X-ray photoelectron spectroscopy (XPS).
    Relation Link: http://pubs.acs.org/
    URI: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/81125
    Appears in Collections:[劉兆玄 (1987-1993)] 期刊論文
    [化學系] 期刊論文

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