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    National Tsing Hua University Institutional Repository > 電機資訊學院 > 電機工程學系 > 會議論文  >  Self- Aligned Microbonded Ge/Si PIN Waveguide Photodetectors


    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/83926


    Title: Self- Aligned Microbonded Ge/Si PIN Waveguide Photodetectors
    Authors: Chih-Kuo Tseng;Jhong-Da Tian;Wei-Cheng Hung;Kai-Ning Ku;Chih-Wei Tseng;Yung-Sheng Liu;Neil Na;Ming-Chang M. Lee
    教師: 李明昌
    Date: 2012
    Publisher: Institute of Electrical and Electronics Engineers
    Relation: IEEE GFP 2012, San Diego, USA, 29-31 Aug. 2012
    Keywords: Self- Aligned
    Microbonded
    Photodetectors
    Abstract: A cost-effective process using self-aligned microbonded Ge-beams on silicon waveguides is presented. Heterojunction photodetectors featuring low dark-current of 0.7uA (-2V) and high turn-on current of 10.8 mA (+3V) are demonstrated. The operation bandwidth is 11-16GHz.
    Relation Link: http://www.ieee.org/
    URI: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/83926
    Appears in Collections:[電機工程學系] 會議論文
    [奈微與材料科技中心] 會議論文
    [光電工程研究所] 會議論文
    [奈米工程與微系統研究所] 會議論文

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