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    Please use this identifier to cite or link to this item: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/83940


    Title: MEMS-Actuated Waveguide Phase Modulators
    Authors: Chun-Che Chang;Wei-Chao Chiu;Jiun-Ming Wu;Jia-Ming Shieh;Ming- Chang M. Lee
    教師: 李明昌
    Date: 2010
    Publisher: Institute of Electrical and Electronics Engineers
    Relation: IEEE the 2010 International Conference on Optical MEMS and Nanophotonics, Sapporo, Japan, 9-12 Aug. 2010
    Keywords: MEMS
    Abstract: An optical phase modulator for integrated optics was proposed by monolithic integration of deformable silicon photonic wires and MEMS actuators. Via applying voltage, the silicon wire is deformed and the wire length is extended, resulting in change of optical phase. A phase shift of 0.18 π is achieved at a bias of 35 V for a 150 μm wire according to numerical simulation. By cascading many of the MEMS-actuated wires, a π-phase shift can be realized at very low operation voltage. Based on this idea, a MEMS-actuated Mach-Zehnder interferometer was demonstrated.
    Relation Link: http://www.ieee.org/
    URI: http://nthur.lib.nthu.edu.tw/dspace/handle/987654321/83940
    Appears in Collections:[電機工程學系] 會議論文
    [奈微與材料科技中心] 會議論文
    [光電工程研究所] 會議論文
    [奈米工程與微系統研究所] 會議論文

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